Our highly skilled team is experienced in the design, creation, and characterization of nano- and micro-fabricated devices. With decades of collective experience, we provide expertise in:

• A wide range of design and implementation of lithographic multilevel processes

• silicon wet and dry etching with isotropic and anisotropic processes

• ultra-smooth surfaces

• design and fabrication of micro-electromechanical systems (MEMS)

• superconducting circuits

• design and fabrication of integrated silicon photonic structures combined with electronic components